Simultaneous High-Speed DualEELS and EDS Acquisition at Atomic Level
نویسندگان
چکیده
The modern STEM is capable of providing a wealth of information, but without fast, efficient detectors that wealth would be lost. Over the last few years, EELS systems have become faster, more efficient and capable of acquiring large energy and dynamic ranges while EDS detectors have greatly increased collection angles and counting rates. These advances would be meaningless without the improved brightness of modern electron sources and the aberration correction of the electron probe. In this paper, we show how advances in instrumentation and software control allow EELS and EDS signals to be acquired at high-speed with minimal acquisition dead time. We will present data at atomic level over a range of conditions that show the complementary nature of the techniques and highlight the strength of each.
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